O'Sullivan now holds the record for winning the Masters title on seven occasions, but had to battle back to take the championship after finding himself 4-1 behind following a sluggish start.
However O'Sullivan showed his class to take the next seven frames, including the last three before the afternoon interval, which levelled matters at 4-4.
Perry fought back bravely to take the next two frames to make it 8-6, but then spurned the chance to close the gap to just a frame before O'Sullivan took control again to see out the match.
"Joe played a brilliant tournament, a really good match and he should've beaten me, I got lucky - I stole it," says O'Sullivan. "Joe will come again and he is a tough competitor.
"I'm just relieved to have got over the line. The fans have been unbelievable and I really enjoyed this week. It is great to get some records, I still have the World Championship one to get.
"When I was younger I was just happy to win one, so to win seven, someone up there is looking after me. I just appreciate every opportunity to play in front of these fans."